Electron optics apparatus

Details Electron optics apparatus Electron optics apparatus

1978-04-10

1980-04-01

Blum, Theodore M.

Electric lamp and discharge devices: systems

Cathode ray tube circuits

Plural concentrating, accelerating, and/or de-accelerating...

315391, 313429, H01J 2946, H01J 2956

Patent

active

041963733

ABSTRACT:
Electron optics apparatus, for use in electron-beam lithography, electron-beam-addressable memory tubes and the like, utilizes a tri-potential collimating condenser lens and a multi-element matrix lens of the "flys eye" type with coarse deflection elements positioned therebetween to deflect the collimated electron beam from the condenser lens to the appropriate aperture in the matrix of lenslets. The condenser lens electrode and matrix lens electrode closest to one another, as well as the coarse deflection electrodes therebetween, are substantially the only elements in the apparatus which float at a relatively high electrical potential, thereby simplifying the requirements of peripheral circuitry while retaining the advantages of the "flys eye" matrix lens.

REFERENCES:
patent: 2850657 (1958-09-01), McNaney
patent: 3534219 (1970-10-01), Newberry
patent: 3641510 (1972-02-01), Chen
patent: 3936693 (1976-02-01), Parks et al.

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