Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1991-05-09
1993-03-09
Arnold, Bruce Y.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
2504923, 359 1, 359 27, G03H 100
Patent
active
051928671
ABSTRACT:
In an electron holography apparatus having an electron source, a specimen holder, an electron lens system, and an electron biprism, the electron biprism is so constructed as to be rotatable about the electron optics axis. The rotation angle about the electron optics axis is commanded by the operator of the electron holography apparatus. A central wire of the electron biprism is allowed to be translated in a direction orthogonal to the electron optics axis, thus permitting the application of the fringe scanning method. The center of an aperture is selectively allowed to be aligned with that of the electron biprism to ensure that the measurement apparatus can be used selectively as either the electron holography apparatus or an electron microscope.
REFERENCES:
patent: 3761721 (1973-09-01), Altshuler et al.
patent: 4532422 (1985-07-01), Nomura et al.
patent: 4935625 (1990-06-01), Hasegawa et al.
patent: 4950909 (1990-08-01), Yokoto et al.
patent: 4998788 (1991-03-01), Osakabe et al.
Osakabe et al, "Observation of atomic steps by reflection electron holography", Japanese Journal of Applied Physics Letters, vol. 27, No. 9, Sep. 1988, pp. 1772-1774.
Tonomura, "Applications of electron holography using a field-emission electron microscope," Journal of Electron Microscopy, vol. 33, No. 2, 1984, pp. 101-115.
Missiroli et al, "Electron interferometry and interference electron microscopy", Journal of Physics E. Scientific Instruments, vol. 14, No. 6, 1981 pp. 649-653, 662, 664.
"Electron Microscope", vol. 10, No. 2, 1975, pp. 111-118.
Endo Junji
Furutsu Tadao
Osakabe Nobuyuki
Tomita Masahiro
Tonomura Akira
Arnold Bruce Y.
Hitachi , Ltd.
Ryan J. P.
LandOfFree
Electron optical measurement apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electron optical measurement apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron optical measurement apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-212504