Electron optic column and scanning electron microscope

Details Electron optic column and scanning electron microscope Electron optic column and scanning electron microscope

1993-09-28

1995-03-21

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250396R, H01J 3722

Patent

active

053998600

ABSTRACT:
An electron microscope is provided which is reduced in total weight and shape. An electron gun cathode and an electron gun lens are enclosed in an electron gun chamber. An electron beam emitted from the electron gun chamber is converged by an objective lens to irradiate a wafer. Each of the electron gun lens and the objective lens is formed as an electrostatic field lens.

REFERENCES:
patent: 3566071 (1971-02-01), Matchett et al.
patent: 4694178 (1987-09-01), Harte
patent: 4706019 (1987-11-01), Richardson
patent: 4820927 (1989-04-01), Langner et al.
patent: 4851768 (1989-07-01), Yoshizawa
patent: 4864228 (1989-09-01), Richardson
patent: 4958079 (1990-09-01), Gray
patent: 5051593 (1991-09-01), Ishihara
patent: 5229607 (1993-07-01), Matsui et al.
patent: 5270643 (1993-12-01), Richardson et al.

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