Electron multiplier for scanning electron mircroscopes

Details Electron multiplier for scanning electron mircroscopes Electron multiplier for scanning electron mircroscopes

1996-10-11

1998-02-10

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37244, H01J 3728

Patent

active

057172064

ABSTRACT:
In the scanning electron microscope 10, the electron beam B is emitted to the specimen 2. When the electron beam B strikes the specimen 2, the specimen 2 reflects the electron beam as reflected primary electrons and generates secondary electrons. Those electrons are detected by the electron detector 14, which in turn produces a reflection image of the specimen 2. The electron multiplier 1 is used for this scanning electron microscope 10. The electron multiplier 1 includes the electron reflection plate 7 which receives the electron beam B when the electron beam B passes by or passes through the specimen 2. Upon receipt of the electron beam B, the electron reflection plate 7 reflects the electron beam B as reflected primary electrons and generates secondary electrons. The microchannel plate 3 is formed with a multiplicity of channels 31 for multiplying the reflected primary electrons and the secondary electrons.

REFERENCES:
patent: 3896308 (1975-07-01), Venables et al.
patent: 4868394 (1989-09-01), Fukuhara et al.
patent: 4958079 (1990-09-01), Gray
Patent Abstracts of Japan vol. 015, No. 037 (P-1159), Jan. 29, 1991, & JP 02 275368 A (Fujitsu Ltd) Nov. 9, 1990, *Abstract*.

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