Electron microscopy system, electron microscopy method and...

Details Electron microscopy system, electron microscopy method and... Electron microscopy system, electron microscopy method and...

2005-09-27

2005-09-27

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S305000, C250S306000, C250S307000, C250S3960ML, C250S3960ML, C250S397000, C250S399000, C250S492300

Reexamination Certificate

active

06949744

ABSTRACT:
An electron microscopy system and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron pulses are directed onto a sample surface and electrons emanating from the sample surface are detected, time resolved. To this end the system comprises in particular a cavity resonator. A cavity resonator can also be used to reduce aberrations of focusing lenses.

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