Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-09-12
2006-09-12
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000, C250S305000
Reexamination Certificate
active
07105814
ABSTRACT:
A probe-forming electron microscopy system1(SEM) is proposed which comprises a position-sensitive detector15. As a result, position-dependent secondary electron intensities in the object plane7or angle-dependent secondary electron intensities in the object plane7may be observed.
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Berman Jack I.
Carl Zeiss NTS GmbH
Jones Day
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