Electron microscopy system

Details Electron microscopy system Electron microscopy system

2005-09-20

2005-09-20

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S305000

Reexamination Certificate

active

06946657

ABSTRACT:
A particle-optical apparatus is disclosed which combines the functions of an energy selector27and a beam splitter21.The particle-optical apparatus is used in an electron microscopy system and serves to separate and superimpose, respectively, beam paths of a primary electron beam11and a secondary electron beam13.

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patent: 2003/0066961 (2003-04-01), Kienzle et al.
patent: 2001076659 (2001-03-01), None
Ludwig Reimer, “Electron Spectrometers and Filter Lenses,” Transmission Electron Microscopy, Physics of Image Formation and Microanalysis, 1997, vol. 71, pp. 118-121, Springer Series in Optical Sciences.

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