Electron microscopic inspection apparatus

Details Electron microscopic inspection apparatus Electron microscopic inspection apparatus

2006-08-15

2006-08-15

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S440110

Reexamination Certificate

active

07091496

ABSTRACT:
Both wafers on which copper wiring was performed and wafers on which non-copper wiring was performed can be inspected by a single unit of electron microscopic inspection apparatus with no possibilities of the wafers being contaminated with copper. All elements within the apparatus that come in contact with wafers, such as hands of a wafer transporter, are duplicated or more and one of the elements that contact wafers is used appropriately for the wafers under inspection which may be either the wafers on which copper wiring was performed or the wafers on which non-copper wiring was performed.

REFERENCES:
patent: 5092729 (1992-03-01), Yamazaki et al.
patent: 2000-260776 (2000-09-01), None

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