Electron-microscopic image viewing system

Details Electron-microscopic image viewing system Electron-microscopic image viewing system

1988-09-09

1989-09-12

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, H01J 3726

Patent

active

048662739

ABSTRACT:
A viewing system destined to be employed in association with a transmission electron microscope, which system comprises a converter for converting an image of a specimen focused by a focusing lens system of the electron microscope into an electric signal, a frame memory for processing the electric signal obtained from the converter for each image frame to thereby derive image frame data to be stored therein, a display unit for displaying an electron-microscopic image with or without other data on the basis of the contents of the frame memory, a simulator for deriving a simulated image corresponding to the electron microscopic image, a simulation frame memory for processing the simulated image data derived through the simulated image deriving unit for each image frame to thereby store data resulting from the processing and displaying a simulated image on the basis of the output of the simulation frame memory, wherein the conditions required for deriving the simulated image are transmitted from the unit for controlling the electron microscope to the simulated image deriving unit, whereby at least portions of the electron-microscopic image and the corresponding simulated image, respectively, are displayed concurrently.

REFERENCES:
patent: 4091374 (1978-05-01), Muller et al.
patent: 4146788 (1979-03-01), Mirkin et al.
Isakozawa et al., Proc. of 43rd Ann. Meeting of the Electron Microscopy Society of America, 1985, pp. 140-141.
Kobayashi et al., Proc. XIth Cong. on Electron Microscopy, Kyoto, 1986, pp. 453-454.

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