Electron microscope with optical microscope

Details Electron microscope with optical microscope Electron microscope with optical microscope

1979-12-27

1981-05-05

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250442, 250457, G01N 2300

Patent

active

042661285

ABSTRACT:
A combination of electron microscope and optical microscope. The optical microscope is juxtaposed adjacent to the electron microscope so that the optical and lens axes of respective microscopes extend in parallel to each other. A specimen transfer mechanism is provided in common to both of the electron microscope and the optical microscope for interchangeably positioning a specimen to be observed at respective predetermined positions along the lens axis and the optical axis for alternative observations through the electron microscope and the optical microscope. The specimen transfer means including specimen holding bar adapted to be displaced in two-dimensional direction in a plane extending orthogonally to both of the lens axis and the optical axis thereby to interchangeably position the specimen at the predetermined positions through displacement of the specimen holding bar which corresponds to a distance between the lens axis and the optical axis. One and the same specimen is allowed to be interchangeably observed through both of the electron microscope and the optical microscope by correspondingly manipulating the specimen transfer means.

REFERENCES:
patent: 3514595 (1970-05-01), Schwarz et al.
patent: 3823321 (1974-07-01), Rauch
patent: 3885157 (1975-05-01), Heinemann

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