Electron microscope specimen supports

Details Electron microscope specimen supports Electron microscope specimen supports

1996-08-28

1998-10-13

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

H01J 3720

Patent

active

058215441

ABSTRACT:
A specimen support for use in an electron microscope comprises a deposited diamond film. The film is deposited on a substrate using a plasma assisted chemical vapor deposition process and then machined to a desired configuration using a laser machining process. Molybdenum, tungsten or silicon are used as substrates.

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patent: 5458754 (1995-10-01), Sathrum et al.
IBM Technical Disclosure Bulletin, vol. 23, No. 5, Oct. 1980, New York, US, pp. 2140-2141, XP002020102, Krakow, et al., "Microgrids for Electron Microscopy, Oct. 1980.".

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