Electron microscope or the like and method of use

Details Electron microscope or the like and method of use Electron microscope or the like and method of use

1978-09-18

1980-03-18

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396R, G01M 2300

Patent

active

041941160

ABSTRACT:
The invention contemplates method and means for using an electron microscope in conjunction with a projection system whereby the microscope produces a distortion-corrected image of an object at a relatively low magnification level, the distortion-corrected image being at the object plane of the projection system, whereby magnification may be varied in accordance with excitation of the projection system, and whereby a delicate object specimen may be fixedly positioned and exposed to large-area low-level illuminating flux within the objective lens system of the microscope.

REFERENCES:
patent: 2494442 (1950-01-01), Le Poole

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