Electron microscope of scanning type

Details Electron microscope of scanning type Electron microscope of scanning type

1981-02-17

1984-01-17

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3728

Patent

active

044265778

ABSTRACT:
An electron microscope of scanning type comprises first and second detectors for detecting secondary electrons emitted from a specimen irradiated by a scanning electron beam are disposed across the magnetic field of an objective lens of an electron-optical system of the microscope. The detection signals obtained from the outputs of both detectors are subjected to simultaneous signal processings.

REFERENCES:
patent: 2749464 (1956-06-01), Le Poole
patent: 3107297 (1963-10-01), Wittry
patent: 3329813 (1967-07-01), Hashimoto
patent: 3597607 (1971-08-01), Campbell et al.
patent: 3628014 (1971-12-01), Grubic, Jr.
patent: 3845305 (1974-10-01), Liebl
patent: 4121100 (1978-10-01), Kubozoe et al.

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