Electron microscope of a scanning type

Details Electron microscope of a scanning type Electron microscope of a scanning type

1982-09-30

1984-07-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

G01N 2300

Patent

active

044581513

ABSTRACT:
An electron microscope of a scanning type provided with two specimen stages for allowing specimens of a large size and a small size to be selectively and interchangeably observed. The microscope comprises an electron gun, a first objective lens for observing a small size specimen, a second objective lens for observing a large size specimen, the second objective lens being disposed in axial opposition to the electron gun with the first objective lens disposed therebetween. The specimen stage for the small size specimen is disposed in the vicinity of the first objective lens, while the specimen stage for the large size specimen is disposed near the focal plane of the second objective lens. Improved stability, high resolving power and simplified manipulatability are attained.

REFERENCES:
patent: 3509335 (1970-04-01), Nixon
patent: 3872305 (1975-03-01), Koike
patent: 4066905 (1978-01-01), Dussler et al.
patent: 4121100 (1978-10-01), Kubozoe et al.

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