Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-10-18
2005-10-18
Font, Frank G. (Department: 2883)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000
Reexamination Certificate
active
06956212
ABSTRACT:
An electron microscope observation system and an observation method are provided. The electron microscope observation system and the observation method can reduce initial investment, and can eliminate burden of maintenance of the apparatus, and can easily and appropriately perform preparation of a sample.An electron microscope, an image display unit of an electron microscope center side for displaying an image of image signals obtained by irradiating electrons on a sample using the electron microscope, a transmission path for transmitting the image signals and an image display unit of an operation center side for displaying a screen of the electron microscope by the image signals are provided, and an observation appointment and approval screen is displayed on the two image display units, and the sample preparation-processed in the observation center side based on an instruction given from the operation center is loaded, and observation of the sample is executed based on sample observation condition information to output image information, and the observation image is displayed on the two image display unites, and charge processing is executed based on a content level of the observation including preparation processing of the sample and occupying hours of the electron microscope to display the charge processing result.
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Dickstein , Shapiro, Morin & Oshinsky, LLP
Font Frank G.
Hitachi , Ltd.
Kalivoda Christopher M.
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