Electron microscope, methods to determine the contact point...

Details Electron microscope, methods to determine the contact point... Electron microscope, methods to determine the contact point...

2006-07-23

2008-10-14

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S311000

Reexamination Certificate

active

07435954

ABSTRACT:
An electron microscope suitable for observing at least one sample is provided. The sample has at least one testing area, and a material of the sample on the testing area is semiconductive or conductive. The electron microscope includes a stage, an electron gun, and at least one probe. The stage is suitable for carrying the sample and the sample is not electrically grounded. The electron gun is suitable for generating an electron beam and accumulating charges on the sample. When the probe contacts with the testing area, the image contrast of the testing area will change. The current through the probe will also change upon contact. Methods have been provided based on these principles to determine “when” and “where” the probe starts to contact the sample surface inside an electron microscope.

REFERENCES:
patent: 6828571 (2004-12-01), McCord et al.
patent: 6930309 (2005-08-01), Mankos et al.
patent: 6979822 (2005-12-01), Stewart et al.
Kim, et al., In situ manipulation and characterizations using nanomanipulators inside a field emission-scanning electron microscope, Review of Scientific Instrumnets, Sep. 2003, p. 4021-4025, vol. 74, No. 9 American Institute of Physics.
Methods of determining the contact between a probe and a surface under scanning electron microscopy by C.-H. Nien et al., Review of Scientific Instruments 77, 103709 (2006). and Nov. 6, 2006 issue of Virtual Journal of Nanoscale Science & Technology, http://www.vjnano.org.

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