Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-08-23
2005-08-23
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S306000, C250S307000, C250S397000
Reexamination Certificate
active
06933499
ABSTRACT:
An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image observation conditions out of a plurality of simplified image observation conditions, which were set previously to contain setting of a degree of vacuum, based on the characteristic of the specimen, and a preview setting section for setting a preview function that forms a plurality of simplified observation images simply based on a plurality of different simplified image observation conditions and displays them on a display section. A preview function of forming simply a plurality of observation images based on a plurality of image observation conditions containing a degree of vacuum as a parameter and then displaying them in a second display area is executed.
REFERENCES:
patent: 6593152 (2003-07-01), Nakasuji et al.
patent: 6734429 (2004-05-01), Takagi
patent: 6768114 (2004-07-01), Takagi
patent: 2001-338603 (2001-12-01), None
patent: 2002-289129 (2002-10-01), None
Furukawa Hiroshi
Hirata Tomohiko
Keyence Corporation
Kilyk & Bowersox P.L.L.C.
Wells Nikita
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