Electron microscope, measuring method using the same,...

Details Electron microscope, measuring method using the same,... Electron microscope, measuring method using the same,...

2008-07-15

2008-07-15

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S210000

Reexamination Certificate

active

11119934

ABSTRACT:
The present invention relates to an electron microscope which reduces a difference in measured values that occur due to a difference in resolution that cannot be fully adjusted which exists among electron microscopes, or occurs as time elapses, and a method for measuring dimensions. An operator adapted to compensate for changes of an electron image to be generated due to a difference in probe diameter is obtained in advance from electron images of one reference sample created by electron microscopes having different resolution (probe diameter). Then a compensation-measurement electron image which is equivalent to an electron image created under the same probe diameter by applying the operator for compensation, and the compensation-measurement electron image is used for measuring the dimensions.

REFERENCES:
patent: 5717204 (1998-02-01), Meisburger et al.
patent: 6346426 (2002-02-01), Toprac et al.
patent: 7095022 (2006-08-01), Nakasuji et al.
patent: 11-040096 (1999-02-01), None
Contrast-to-Gradient Method For The Evaluation Of Image Resolution In Scanning Electron Microscopy, pp. 369-382, Japanese Society of Microscopy, Journal of Electron Microscopy, Ishitani et al, Aug. 16, 2002.
Scanning Electron Microscope pp. 48, Edited by the Japanese Society of Microscopy, Kanto Division (and Translation).

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