Electron microscope including improved means for determining and

Details Electron microscope including improved means for determining and Electron microscope including improved means for determining and

1976-06-21

1977-06-21

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, H01J 3726

Patent

active

040313913

ABSTRACT:
A corpuscular beam microscope, specifically an electron microscope, inclug means for adjusting the position of the object image in the microscope, and means, coupled to said adjusting means, for determining and correcting drift of the object image by means of a control signal which controls the adjusting means and is derived from a convolution of an actual object image with a stored reference object image. The improvement of the invention comprises the provision of means for deriving the convolution by imaging the actual object image directly on the reference object image.
A method for determining the convolution of the actual and reference object images in which the brightness values of the images are reduced to two values and the images are subsequently brought into coincidence is also disclosed.

REFERENCES:
patent: 3700895 (1972-10-01), Dicke

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