Electron microscope image focusing using instantaneous emission

Details Electron microscope image focusing using instantaneous emission Electron microscope image focusing using instantaneous emission

1985-11-26

1987-09-15

Howell, Janice A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

2503272, 250397, H01J 3721, H01J 3722

Patent

active

046941711

ABSTRACT:
A two-dimensional image sensor is exposed under vacuum to an electron beam having passed through a specimen, and instantaneous light emitted from the image sensor upon exposure to the electron beam is detected with an image intensifier to reproduce an image observed to attain a desired focused condition and/or a desired field. After the image has been focused by the operator while observing the image, the image sensor is exposed under vacuum to an electron beam having been transmitted through the specimen to store the energy of the electron beam representative of the image of the specimen on the image sensor. Then, stimulating energy is applied to the image sensor for discharging light therefrom which represents the stored energy of the electron beam. The light discharged from the image sensor is photoelectrically detected to reproduce the transmitted electron-beam image of the specimen as a final output image thereof under the desired focused condition and/or with said desired field.

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