Electron microscope having X-ray detector

Details Electron microscope having X-ray detector Electron microscope having X-ray detector

1989-03-30

1990-03-20

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37244

Patent

active

049103997

ABSTRACT:
There is disclosed an electron microscope having an X-ray detector that detects the X-rays emanating from a specimen placed between the upper and lower magnetic pole pieces of an objective lens in the path of an electron beam. The dimension of the detector taken longitudinally of the gap between the pole pieces is larger than the dimension of the detector taken across the gap. A heat transfer rod is inserted between the gap to cool the detector. The detector is mounted to the rod. There is also disclosed an electron microscope having an X-ray detector mounted on the side surface of a heat transfer rod which faces the path of an electron beam. The rod extends along a straight line that runs substantially perpendicular to the path remotely from the path.

REFERENCES:
patent: 3924126 (1975-12-01), Anderson et al.
patent: 4633085 (1986-12-01), Tomita et al.

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