Electron microscope having electrical and mechanical position co

Details Electron microscope having electrical and mechanical position co Electron microscope having electrical and mechanical position co

1989-12-05

1991-04-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, H01J 3726

Patent

active

050085360

ABSTRACT:
An electron microscope and positioning method comprises a stage, an objective lens, a magnifying lens, a magnification setting the magnifying lens, a stage mover for mechanically moving the stage in two directions defining a two dimensional space so as to move a visual field of the speciment and a electrical shifting device which is disposed on opposite sides of an axis of rotation about which the image is rotated through an angle in the two dimensional directions so as to move the visual field in fine increments. The objective lens rotates the electron beam through the angle. A control panel sets the moving distance and moving direction of the stage mover and the electrical shifting device, and a computer selects the stage mover or the electrical shifting device according to the magnification setting and controls the stage mover or the electrical shifting device according to the moving distance and the moving direction. The stage mover and the electrical shifting device are automatically and selectively controlled by the control panel according to the magnification setting without changing the moving direction of the specimen image displayed in an image observing device.

REFERENCES:
patent: 3737659 (1973-06-01), Yanaka et al.
patent: 3757117 (1973-09-01), Muller et al.
patent: 4044255 (1977-08-01), Kirsch et al.
patent: 4687931 (1987-08-01), Fukuhara et al.

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