Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1990-02-07
1990-12-18
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250305, 250396R, H01J 3726
Patent
active
049788558
ABSTRACT:
Electron microscope for investigation of surfaces of solid bodies with a primary beam path along which are arranged sequentially an electron beam source, an electron lens, an energy-selective electrostatic deflecting field, a magnetic deflecting field, a cathode lens, in whose object plane lies the test surface to be investigated, further with a secondary beam path, which passes in sequence through the cathode lens, the magnetic deflecting field, an energy filter, which includes a decelerating lens, a contrast stop, an electrical sector field, an energy stop and an accelerating lens, and two projection lenses, to a detector, such as a luminescent screen. The first-mentioned electrostatic deflecting field compensates for the energy dispersion of the magnetic deflecting field in the entrance side focal plane of the cathode lens. The energy filter limits the energy range of the electrons in the secondary beam path.
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Liebl Helmut
Senetinger Bertold
Anderson Bruce C.
Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
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