Electron microscope equipped with x-ray analyzer

Details Electron microscope equipped with x-ray analyzer Electron microscope equipped with x-ray analyzer

1993-03-05

1994-05-31

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37244

Patent

active

053171543

ABSTRACT:
An electron microscope equipped with an x-ray detector whose position is made different, depending on whether the detector is in use or not. The microscope prevents the irradiated position and the image from escaping even when the detector is moved into or out of a valve. A switch is operated to move the detector. The microscope has a deflection current-correcting circuit which supplies correcting currents to the deflection coils in step with the operation of the switch.

REFERENCES:
patent: 4724320 (1988-02-01), Ino et al.
patent: 4910399 (1990-03-01), Taira et al.
patent: 5270544 (1993-12-01), Taira

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