Electron microscope equipped with measuring facility

Details Electron microscope equipped with measuring facility Electron microscope equipped with measuring facility

1982-02-11

1984-08-28

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

G01N 2304, H01K 3726

Patent

active

044685602

ABSTRACT:
Electron microscope imparted with measuring functions comprises an electron microscope system for forming an electron-microscopic image, a fluorescent screen for displaying the electron-microscopic image, and an optical microscope for observing the electron-microscopic image on the fluorescent screen. A pattern which provides convenience for measurements of the electron-microscopic image is imaged on an object plane of an eyepiece of the optical microscope.

REFERENCES:
patent: 3807846 (1974-04-01), Swank
patent: 4186305 (1980-01-01), Taoka et al.
patent: 4206349 (1980-06-01), Kamimura
patent: 4221965 (1980-09-01), Konishi et al.
patent: 4233510 (1980-11-01), Sato

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