Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-07-10
2007-07-10
Kim, Robert (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S306000, C250S307000, C250S550000, C250S492100, C250S492300, C369S126000, C073S105000
Reexamination Certificate
active
11134090
ABSTRACT:
There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.
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Inoue Masao
Murakami Yasukazu
Oikawa Tetsuo
Shindo Daisuke
Hashmi Zia R.
JEOL Ltd.
Kim Robert
The Webb Law Firm
Tohoku University
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