Electron microscope comprising an X-ray detector

Details Electron microscope comprising an X-ray detector Electron microscope comprising an X-ray detector

1981-10-26

1984-05-22

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

G01N 23225, H01J 37256

Patent

active

044503555

ABSTRACT:
A detector for measuring X-rays in an electron microscope comprises a shield which shields a detector entrance window against the incidence of electrons or not in accordance with the various measuring settings. The shield may be arranged to be movable under the influence of the magnetic field strength variation which occurs during the switching over between the various measuring settings.

REFERENCES:
patent: 3359418 (1967-12-01), Bahr et al.

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