Electron microscope backscattered electron detectors

Details Electron microscope backscattered electron detectors Electron microscope backscattered electron detectors

1979-04-04

1980-08-12

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250483, G01M 2300

Patent

active

042174953

ABSTRACT:
An electron microscope backscattered detector comprising an arm of scintillation material with a hole through which the electron beam passes, the hole being provided with a removable grounded liner to facilitate cleaning and prevent astigmatism problems due to electron build up.

REFERENCES:
patent: 2939012 (1960-05-01), Scherbatskoy
patent: 3781562 (1973-12-01), Singh
patent: 3942005 (1976-03-01), Watanabe
patent: 4149074 (1979-04-01), Schliepel et al.

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