Electron microscope and specimen stage positioning control...

Details Electron microscope and specimen stage positioning control... Electron microscope and specimen stage positioning control...

2006-09-14

2008-10-14

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

Reexamination Certificate

active

07435974

ABSTRACT:
An electron microscope is disclosed, wherein a specimen stage includes a base having an X-slide guide member, a center table adapted to move along the X-slide guide member, and an X rod for driving the center table. A gap is formed in the coupling between the guide unit of the center table and the X rod. A control unit performs the position control operation to monitor the measurement of a position detector such as a laser interferometer, stop driving the center table at a designated stop position, and separate the table and the X rod from each other using the gap.

REFERENCES:
patent: 6724466 (2004-04-01), Ono et al.
patent: 6794660 (2004-09-01), Watson
patent: 6882126 (2005-04-01), Watson et al.
patent: 9-166428 (1997-06-01), None
patent: 2002-126964 (2002-05-01), None
patent: 2004-134155 (2004-04-01), None

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