Electron microscope and sample observing method using the same

Details Electron microscope and sample observing method using the same Electron microscope and sample observing method using the same

1996-05-21

1998-06-16

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, H01J 3726

Patent

active

057675163

ABSTRACT:
A method of observing an electric defect inside a solid sample directly by observing the situation in which conduction electrons are scattered inside the solid sample and means for realizing the method are described. A thin film electrode 2 is arranged opposite to the surface of the solid sample 1 with a minute gap, potential difference is applied between the solid sample 1 and the thin film electrode 2 by a gap voltage supply 7, conduction electrons inside he solid sample 1 are extracted outside the sample 1 by tunnel effect, and an electronic image by these extracted electrons is formed and displayed using an electronic optical system 5. By observing said electronic image, the situation of scattering of conduction electrons inside the solid sample 1 can be known and further, the information of an electric defect inside the solid sample 1 can be obtained.

REFERENCES:
patent: 4618767 (1986-10-01), Smith et al.
patent: 4665313 (1987-05-01), Wells
patent: 4680469 (1987-07-01), Nomura et al.
patent: 5278406 (1994-01-01), Kinoshita
"Micro-Beam Analysis", published 1985 by Asakura Syoten, pp. 181-187.
"Surface Science", vol. 126, 1983, pp. 236-244, Scanning Tunneling Microscopy Binnig et al.
"Advances in Electronics and Electron Physics", vol. 18, published by Academic Press, New York, pp. 251-255; Mollensteds et al. Electron Emmision Microscopy has No date.

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