Electron microscope and electron beam inspection system

Details Electron microscope and electron beam inspection system Electron microscope and electron beam inspection system

2008-07-01

2008-07-01

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S397000, C250S306000, C250S307000

Reexamination Certificate

active

07394066

ABSTRACT:
An electron microscope includes an illuminating lens system that illuminates an electron beam that is emitted from an electron source onto a specimen as a planar illuminating electron beam having a two-dimensional spread, an imaging lens system that projects and magnifies the reflecting electron beam emitted from the specimen to project and form a specimen image, a beam separator that separates the illuminating electron beam from the reflecting electron beam, and a controller. The controller controls the reflecting electron beam so as to go straight through the beam separator, and the illuminating electron beam so as to keep a deflection angle of the illuminating electron beam which is made by the beam separator substantially constant.

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patent: 2003-202217 (2003-07-01), None
Marian Mankos, et al., “Imaging Hot-Electron Emission from Metal-Oxide-Semiconductor Structures”, 1996 The American Physical Society, pp. 3200 and 3203.
R.M. Tromp, “Low-Energy Electron Microscopy”, IBM J. Res. Develop., vol. 44, No. 4 Jul. 2000, pp. 503-516.

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