Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2006-02-17
2009-10-13
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S310000, C250S306000, C250S307000, C250S442110, C250S3960ML, C359S009000, C359S029000, C359S032000, C359S001000, C359S002000, C359S003000, C359S007000, C359S015000, C356S489000, C356S457000, C356S484000
Reexamination Certificate
active
07601957
ABSTRACT:
An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to image forming lenses, as well as a combined illumination lens used for such an electron microscope. The electron microscope according to the present invention has an electron source (11), a condenser lens (12), a biprism (13) to split an electron beam supplied from the condenser lens (12) into coherent first and second electron beams (L1, L2) that are parallel to each other, a combined illumination lens (15) to make the first electron beam (L1) into a parallel wave and the second electron beam (L2) into a converging wave that converges at a predetermined distance, a sample stage (16) to hold a sample illuminated with the first electron beam (L1), a detector (17) to detect a hologram of a diffraction pattern formed by interference of the first electron beam (L1) with the second electron beam (L2), a computing unit (18) to conduct a predetermined Fourier transform on the hologram supplied from the detector (17) and reconstruct a microscopic image of the sample, and a display (19) to display the reconstructed microscopic image.
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Yasuda, H., et al., “Evaluation of the Multi-column-cell (MCC)—PoC (proof of concept) system”, Application to Charged Particle Beam Industry No. 132 Committee, No. 161 Study Meeting Material, Japan Society for the Promotion of Science, pp. 125-128, (2003).
Haraguchi, T., et al., “Multicolumn cell: Evaluation of the proof of concept system”,J. Vac. Sci. Tecnol. B,vol. 22, No. 3, pp. 985-988, (2004).
Achihara Masato
Endoh Hisamitsu
Oikawa Tetsuo
Tsuno Katsushige
Berman Jack I
Meyer Jerald L.
National University Corporation Kyoto Institute of Technology
Richmond Derek
Sahu Meenakshi S
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