Electron microscope and combined illumination lens

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

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C250S310000, C250S306000, C250S307000, C250S442110, C250S3960ML, C359S009000, C359S029000, C359S032000, C359S001000, C359S002000, C359S003000, C359S007000, C359S015000, C356S489000, C356S457000, C356S484000

Reexamination Certificate

active

07601957

ABSTRACT:
An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to image forming lenses, as well as a combined illumination lens used for such an electron microscope. The electron microscope according to the present invention has an electron source (11), a condenser lens (12), a biprism (13) to split an electron beam supplied from the condenser lens (12) into coherent first and second electron beams (L1, L2) that are parallel to each other, a combined illumination lens (15) to make the first electron beam (L1) into a parallel wave and the second electron beam (L2) into a converging wave that converges at a predetermined distance, a sample stage (16) to hold a sample illuminated with the first electron beam (L1), a detector (17) to detect a hologram of a diffraction pattern formed by interference of the first electron beam (L1) with the second electron beam (L2), a computing unit (18) to conduct a predetermined Fourier transform on the hologram supplied from the detector (17) and reconstruct a microscopic image of the sample, and a display (19) to display the reconstructed microscopic image.

REFERENCES:
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patent: 5811806 (1998-09-01), Honda et al.
patent: 54-122970 (1979-09-01), None
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patent: 90-80199 (1997-03-01), None
patent: 2004-296908 (2004-10-01), None
Yasuda, H., et al., “Evaluation of the Multi-column-cell (MCC)—PoC (proof of concept) system”, Application to Charged Particle Beam Industry No. 132 Committee, No. 161 Study Meeting Material, Japan Society for the Promotion of Science, pp. 125-128, (2003).
Haraguchi, T., et al., “Multicolumn cell: Evaluation of the proof of concept system”,J. Vac. Sci. Tecnol. B,vol. 22, No. 3, pp. 985-988, (2004).

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