Electron microscope and combined illumination lens

Details Electron microscope and combined illumination lens Electron microscope and combined illumination lens

2006-02-17

2009-10-13

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S306000, C250S307000, C250S442110, C250S3960ML, C359S009000, C359S029000, C359S032000, C359S001000, C359S002000, C359S003000, C359S007000, C359S015000, C356S489000, C356S457000, C356S484000

Reexamination Certificate

active

07601957

ABSTRACT:
An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to image forming lenses, as well as a combined illumination lens used for such an electron microscope. The electron microscope according to the present invention has an electron source (11), a condenser lens (12), a biprism (13) to split an electron beam supplied from the condenser lens (12) into coherent first and second electron beams (L1, L2) that are parallel to each other, a combined illumination lens (15) to make the first electron beam (L1) into a parallel wave and the second electron beam (L2) into a converging wave that converges at a predetermined distance, a sample stage (16) to hold a sample illuminated with the first electron beam (L1), a detector (17) to detect a hologram of a diffraction pattern formed by interference of the first electron beam (L1) with the second electron beam (L2), a computing unit (18) to conduct a predetermined Fourier transform on the hologram supplied from the detector (17) and reconstruct a microscopic image of the sample, and a display (19) to display the reconstructed microscopic image.

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Yasuda, H., et al., “Evaluation of the Multi-column-cell (MCC)—PoC (proof of concept) system”, Application to Charged Particle Beam Industry No. 132 Committee, No. 161 Study Meeting Material, Japan Society for the Promotion of Science, pp. 125-128, (2003).
Haraguchi, T., et al., “Multicolumn cell: Evaluation of the proof of concept system”,J. Vac. Sci. Tecnol. B,vol. 22, No. 3, pp. 985-988, (2004).

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