Electron microscope

Details Electron microscope Electron microscope

1980-03-12

1983-04-05

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

G01N 2300

Patent

active

043792316

ABSTRACT:
An electron microscope is disclosed in which an electron beam impinges upon a specimen at a predetermined angle of incidence, the incident azimuth of the electron beam incident upon the specimen is continuously changed, and the electron beam having passed through the specimen is made large in angular spread by a magnifying lens system and then projected onto a viewing screen to form a visual enlarged image of the specimen on the viewing screen; and in which the astigmatism of the magnifying lens system is shown on the viewing screen as the blur of the image.

REFERENCES:
patent: 2886727 (1959-05-01), Haine
patent: 3737659 (1973-06-01), Yanaka et al.
patent: 3749964 (1973-07-01), Hirata
patent: 3900734 (1975-08-01), Kynaston et al.
patent: 4110623 (1978-08-01), Azam et al.
patent: 4117339 (1978-09-01), Wolfe
patent: 4162403 (1979-07-01), Baumgarten

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