Electron microscope

Details Electron microscope Electron microscope

1991-11-25

1993-09-07

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, H01J 3726

Patent

active

052431916

ABSTRACT:
An electron microscope in which at individual coordinates on image memories, the difference between image data obtained before an objective lens current or an accelerating voltage is changed and image data obtained after the current or voltage is changed is determined, an approximate function indicative of the relation between coordinates on the image memories and the difference is calculated, and coordinates on the image memories at which the difference exhibits a minimum value on the basis of the approximate function is determined through arithmetic operation to settle the coordinates as the current (voltage) center.

REFERENCES:
patent: 4531057 (1985-07-01), Kobayashi
patent: 4680469 (1987-07-01), Nomura et al.
patent: 4698503 (1987-10-01), Nomura
patent: 4788425 (1988-11-01), Kobayashi

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