Electron microscope

Details Electron microscope Electron microscope

1996-08-02

1999-06-15

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3729

Patent

active

059124628

ABSTRACT:
In the electron microscope, a degree of sample contamination caused by irradiating electron beams to a sample can be suppressed to an allowable range. The electron microscope is comprised of: means for directly measuring an electron beam irradiation current to a sample; time measuring means for measuring irradiation time of electron beams to an observation region on the sample; and means for calculating a dose of the electron beams irradiated to the observation region based upon the measured electron beam irradiation current, the measured electron beam irradiation time, and preset observation magnification.

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LSI Testing Technology, pp. 285-303, Dec. 25, 1986, published by Torikepps.

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