Electron microscope

Details Electron microscope Electron microscope

1990-07-16

1992-08-25

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, 250306, H01J 37252

Patent

active

051421496

ABSTRACT:
A sample is irradiated with an electron beam and analyzed by detecting characteristics X-rays obtained from the sample and electron beams transmitted thereby. There is provided means, which collects analysis results obtained by this analysis to compare the analysis results thus collected.

REFERENCES:
patent: 4633085 (1986-12-01), Tomita et al.
Watt, Journal of Physics E. Scientific Instruments, vol. 19, No. 9, Sep. 1986, pp. 668-678.
Wintsch et al., Mikrochimica Acta, I, 1982, pp. 63-72.

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