Electron microscope

Details Electron microscope Electron microscope

2008-02-27

2009-12-01

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S307000, C250S306000

Reexamination Certificate

active

07626166

ABSTRACT:
An object of the present invention is to prevent foreign bodies attracted by a magnetic field of an objective lens or an electric field of an electrode plate and adhered to a surface of the objective lens or electrode plate from dropping onto the surface of a sample and adhering there during observation of the sample.To achieve the above object, an electron microscope in which, when a sample to be measured is moved away from below an objective lens, an exciting current to the objective lens of a scanning electron microscope is turned off or excitation thereof is made weaker than before the sample to be measured being moved away, or an applied voltage to an acceleration cylinder for accelerating an electron beam is turned off or made lower than before the sample to be measured being moved away is proposed.

REFERENCES:
patent: 6956211 (2005-10-01), Sato et al.
patent: 2004/0119022 (2004-06-01), Sato et al.
patent: 2008/0203301 (2008-08-01), Saito et al.
patent: 359181448 (1984-10-01), None
patent: 11-135052 (1999-05-01), None
patent: 2006-093161 (2006-04-01), None
patent: 2006 -140070 (2006-06-01), None
patent: 2008-218015 (2008-09-01), None

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