Electron microscope

Details Electron microscope Electron microscope

1977-04-18

1978-10-17

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396ML, G01M 2300, G21M 108

Patent

active

041211006

ABSTRACT:
An electron beam from an electron gun is made to focus on a first position by a focussing lens system. The focussed beam is then magnified and projected on a screen through a magnification lens system having an objective lens, an intermediate lens and a projection lens.
The excitation is so variable that the electron beam may be focussed also on a second position behind the projection lens.
A specimen is positioned at the first position for normal electron microscope analysis, while, for a scanning electron microscope analysis, another specimen is put at the second position.

REFERENCES:
patent: 2354263 (1944-07-01), Hillier
patent: 3696246 (1972-10-01), Buchanan

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