Electron microscope

Details Electron microscope Electron microscope

2006-06-20

2006-06-20

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S311000

Reexamination Certificate

active

07064326

ABSTRACT:
An electron microscope is offered which can analyze the three-dimensional structure of a specimen without sectioning it by making use of computerized tomography. The microscope has solved the problems intrinsic to the microscope and permits application of computerized tomography to general cases. A series of transmission images is obtained by tilting the specimen by plural angles. Two-dimensional correlation processing is performed between each of the series of images and a reference image. The same field of view is selected and extracted. Thus, positional deviation of the specimen is corrected.

REFERENCES:
patent: 5278408 (1994-01-01), Kakibayashi et al.
patent: 5866905 (1999-02-01), Kakibayashi et al.
patent: 04-337236 (1992-11-01), None

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