Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2005-05-03
2005-05-03
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S358100, C250S359100, C250S36100C, C250S363070, C250S370080, C250S3960ML, C250S310000, C250S347000, C250S297000, C250S397000, C250S398000, C250S399000, C250S400000, C250S336100, C250S362000
Reexamination Certificate
active
06888139
ABSTRACT:
The present invention provides an analysis of displacement by calculating the phase variance image P′ (k, l) between Fourier transformed images of paired images S1(n, m) and S2(n, m) to determine the center of gravity of δ peak appearing on the invert Fourier transform image of the images. The present invention provides numerous advantages such as a precision of displacement analysis of a fraction of pixel to thereby allow to improve the precision of focal analysis, or reduced number of pixels required to achieve the same precision, evaluation of reliability of the analysis by using the δ peak intensity, influence of varying background reduced by using a phase variance component. The improved performance by the present invention allows any operator skilled or not to achieve a best focusing.
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Kobayashi Hiroyuki
Koguchi Masanari
Nagaoki Isao
Tsuneta Ruriko
Antonelli Terry Stout & Kraus LLP
Hitachi , Ltd.
Lee John R.
Souw Bernard
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