Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2005-01-11
2005-01-11
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S311000, C250S310000, C250S3960ML, C250S491100
Reexamination Certificate
active
06841775
ABSTRACT:
An electron microscope which permits an operator to perform astigmatic correction and beam alignment. A field of view capable of clearly displaying astigmatism or beam misalignment in terms of a Ronchigram is placed on the optical axis. Then, the operator selects a Ronchigram display mode. A first or second TV camera such as a CCD camera is selected and placed on the optical axis while maintaining the electron optics in the STEM imaging mode. Under this condition, a Ronchigram signal is obtained from the TV camera and supplied to a computer via a TV power supply and an interface. As a result, a Ronchigram of appropriate size and brightness is displayed in an image display region on a display device. The operator corrects astigmatism or adjusts the alignment while observing the Ronchigram.
REFERENCES:
patent: 4866273 (1989-09-01), Kobayashi et al.
patent: 5300776 (1994-04-01), Krivanek
patent: 6677585 (2004-01-01), Nomura
F. Hosokawa et al. entitled “On-line alignment system for TEM using a TV and personal computer”,Inst. Phys. Conf. Ser. No. 138: Section 11, Paper presented at the Electron Microscopy and Analysis Group Conf. EM AG93, Liverpool, 1993, pp. 531-534.
F. Hosokawa et al. entitled “On-line alignment and astigmatism correction using a TV and personal computer”,Proceedings Fifty-First Annual Meeting Microscopy Society of America, Cincinnati, Ohio, Aug. 1-6, 1993, pp. 202-203.
Kondo Yukihito
Matsushita Mitsuhide
Ohsaki Mitsuaki
Hashmi Zia R.
JEOL Ltd.
Lee John R.
Webb Ziesenheim & Logsdon Orkin & Hanson, P.C.
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