Electron microscope

Details Electron microscope Electron microscope

1992-05-29

1994-02-22

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 25044010, 25044211, 250397, 2505151, H01J 3720

Patent

active

052890058

ABSTRACT:
An electron microscope capable of performing accurate X-ray analysis. A specimen stage on which a specimen to be investigated is placed, is disposed between the upper and lower magnetic pole pieces of the objective lens. The specimen is irradiated with the electron beam to detect X-rays emitted from the specimen. The specimen stage consists of a light element, such as beryllium, that produces a very small amount of X-rays when irradiated with the electron beam. A metal film of a heavy element, such as gold, is deposited on the upper surface of the specimen stage. This metal film produces a large amount of X-rays when irradiated with the electron beam. The X-rays emitted from the lower magnetic pole piece are absorbed by the metal film. Consequently, the X-ray detector of the microscope detects only the X-rays produced from the specimen.

REFERENCES:
patent: 3446960 (1969-05-01), Sciacca et al.
patent: 3745341 (1973-07-01), Sakitani
patent: 3778621 (1973-12-01), Mikajiri
patent: 3896314 (1975-07-01), Nukui et al.
patent: 4596934 (1986-06-01), Yanaka et al.
patent: 4803356 (1989-02-01), Kumahora et al.
patent: 4833330 (1989-05-01), Swann et al.

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