Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1990-08-16
1991-03-19
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
250441100, 250442100, G21K 508
Patent
active
050013505
ABSTRACT:
An electron microscope equipped with a specimen positioning device for moving specimen holders within a place perpendicular to the optical axis of the electron beam between the upper and lower magnetic pole pieces of the objective lens and bringing the holders onto the optical axis. The microscope has a member extending through the side wall of the yoke of the objective lens, a preliminary chamber connected with the side wall of the yoke via a valve, and an exchange mechanism. The member can mount and dismount the specimen holders. The plural holders are placed in position within the chamber. The exchange mechanism can mount and dismount the specimen holder placed at a certain position within the chamber and can move this holder between the magnetic pole pieces of the objective lens from the chamber to the member or vice versa. Once the inside of the lens is evacuated to a high vacuum, a plurality of specimens can be observed successively.
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Kasai Tohru
Ohi Kimio
Berman Jack I.
Jeol Ltd.
Nguyen Kiet T.
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