Electron microscope

Details Electron microscope Electron microscope

1988-05-17

1989-06-06

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504401, G21K 510

Patent

active

048374440

ABSTRACT:
There is disclosed an electron microscope equipped with two specimen-positioning devices one of which includes a small specimen holder adapted for high-resolution observation. The other includes a large specimen holder adapted for special observation. The holders are interchangeably placed on the optical axis of the electron beam between upper and lower magnetic pole pieces.

REFERENCES:
patent: 3612863 (1971-10-01), Suzuki
patent: 3896314 (1975-07-01), Nukui et al.
patent: 4596934 (1986-06-01), Yanaka et al.
"A Container for Handling Small Specimens During Preparation and Examination in the Scanning Electron Microscope (SEM)", Taylor, Jour. of Micro., vol. 105, pp. 335-338, 1975, 250-440.1.

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