Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1988-01-05
1989-03-07
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250397, H01J 3726, H01J 37244
Patent
active
048108863
ABSTRACT:
A transmission-type electron microscope using a sensitive two-dimensional sensor in its micrograph-taking section acts as a recording medium for an electron beam. When the sensor is illuminated with an electron beam, it stores the energy of the beam. When the sensor is subsequently illuminated with light, it releases the stored energy as light. In accordance with the invention, at least a portion of the micrograph-taking section includes a member for reducing the amount of x-rays produced or a member for absorbing x-rays to shield the sensor from x-rays.
REFERENCES:
patent: 3327112 (1967-06-01), Akahori
patent: 3671742 (1972-06-01), Browning
Harada Yoshiyasu
Katoh Takayuki
Miyahara Junji
Mori Nobufumi
Oikawa Tetsuo
Anderson Bruce C.
Berman Jack I.
Fuji Photo Film Co. , Ltd.
Jeol Ltd.
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