Electron microscope

Details Electron microscope Electron microscope

1979-11-29

1981-08-11

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250398, G01N 2300

Patent

active

042836271

ABSTRACT:
The electron beam having penetrated a sample is projected on a field limiting plate having an opening by means of an objective lens. That part of the electron beam which has passed through the opening of the field limiting plate, is projected upon a viewing screen by means of an image forming lens system. An electron beam deflection system is disposed between the hind focal point of the objective lens and the field limiting plate, the system having its deflection center at the hind focal point of the objective lens.

REFERENCES:
patent: 3737659 (1973-06-01), Yanaka et al.
patent: 4044254 (1977-08-01), Krisch et al.

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