Electron microscope

Details Electron microscope Electron microscope

1992-11-04

1994-04-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

053048016

ABSTRACT:
An electron microscope is disclosed which permits one to observe a high-contrast TEM image at a high-resolution. The electron microscope according to this invention comprises an objective lens OL which forms a first diffraction image P.sub.1 at the back focal plane of the objective lens OL; a selected area diaphragm 12 located behind the objective lens OL; an objective minilens ML which is located between the objective lens OL and the selected area diaphragm 12, the minilens ML is excited in such a way that the minilens ML produces a second diffraction image P.sub.2 at the position of the selected area diaphragm 12, while the object plane of the minilens being located at the position of the first diffraction image P.sub.1 ; an intermediate lens IL.sub.1 located behind said selected area diaphragm 12 and excited in such a way that the object plane of the intermediate lens IL.sub.1 is located at the position of a TEM image produced by both said objective lens OL and minilens ML; and a lens system (IL.sub.2, PL) which magnifies a TEM image produced by said intermediate lens IL.sub.1 and projects the magnified TEM image onto a viewing screen 13.

REFERENCES:
patent: 3256433 (1966-06-01), Watanabe et al.
patent: 3629575 (1971-12-01), Rakels

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