Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1976-08-09
1977-08-30
Church, Craig E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250397, H01J 3726
Patent
active
040456692
ABSTRACT:
A condenses lens system condenses an elctron beam onto a specimen. The electron beam thus transmitted through the specimen is magnified by a magnifying lens system. The magnified electron beam is projected onto a fluorescent screen, and the image of the specimen is visually observed. The quantity of electrons per unit area in the magnified electron beam is detected by an electron beam detector. In response to the detected signal, the condenser lens system is controlled so as to make constant the quantity of electrons per unit area in the magnified electron beam.
REFERENCES:
patent: 3504176 (1970-03-01), Thon
patent: 3558885 (1971-01-01), Flemming
patent: 3937959 (1976-02-01), Namae
Kamimura Shoji
Saito Yasushi
Church Craig E.
Hitachi , Ltd.
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