Electron microscope

Details Electron microscope Electron microscope

1974-04-24

1976-05-25

Farley, Richard A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 315 31R, H01J 3726

Patent

active

039596516

ABSTRACT:
In a field emission charged particle microscope having a housing defining a vacuum chamber, a field emission tip disposed in the chamber for generating charged particles, electrode means for establishing electrostatic focusing and accelerating field for forming a beam of charged particles, field electrode means in juxtaposition with the tip for developing an electrostatic field for extraction of charged particles generated by the tip and voltage means connected to the electrode means and the tip for supplying electrical potential thereto to establish the electrostatic fields, the inclusion of an apertured, conductive symmetrical glass resistor disposed intermediate the field electrode means and the electrode means for establishing the focusing and accelerating field, and in electrical contact therewith.

REFERENCES:
patent: 2234281 (1941-03-01), Ruska
patent: 3206635 (1965-09-01), Phillips
patent: 3223837 (1965-12-01), Shapiro et al.
patent: 3760383 (1973-09-01), Wolfe

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