Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1983-04-07
1985-05-28
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250396ML, 250398, H01J 3726, H01J 37141
Patent
active
045202648
ABSTRACT:
In an electron microscope, having intermediate lenses between the object and the projection lenses, the first and second intermediate lenses are used for rotating the final electron microscope image without changes in magnification. The desired angle signal indicating to azimuth angle .theta. is designated by an operator. The absolute magnetomotive force .vertline.J1.vertline. and .vertline.J2.vertline. of the first and second intermediate lenses are controlled by a lens control means in the relation that (.vertline.J1.vertline.-.vertline.J2.vertline.) is proportional to the azimuth angle .theta. and (.vertline.J1.vertline.+.vertline.J2.vertline.) is nearly proportional to the square of the azimuth angle .theta..
REFERENCES:
patent: 3746855 (1973-07-01), Hilditch
Honda Toshikazu
Tsuno Katsushige
Berman Jack I.
Jeol Ltd.
Smith Alfred E.
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